{"title":"用统计学方法设计ESD保护装置","authors":"N. Shigyo, H. Kawashima, S. Yasuda","doi":"10.1109/ISQED.2002.996769","DOIUrl":null,"url":null,"abstract":"This paper describes an ESD protection device design to minimize its area A/sub p/ while maintaining the breakdown voltage V/sub ESD/. Hypothesis tests were performed to find the applied surge condition and to select control factors for the design-of-experiments (DOE). Also, TCAD was used to estimate V/sub ESD/. An optimum device structure, where a salicide block was employed, was found using statistical methods and TCAD.","PeriodicalId":20510,"journal":{"name":"Proceedings International Symposium on Quality Electronic Design","volume":"68 1","pages":"337-340"},"PeriodicalIF":0.0000,"publicationDate":"2002-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design of ESD protection device using statistical methods\",\"authors\":\"N. Shigyo, H. Kawashima, S. Yasuda\",\"doi\":\"10.1109/ISQED.2002.996769\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes an ESD protection device design to minimize its area A/sub p/ while maintaining the breakdown voltage V/sub ESD/. Hypothesis tests were performed to find the applied surge condition and to select control factors for the design-of-experiments (DOE). Also, TCAD was used to estimate V/sub ESD/. An optimum device structure, where a salicide block was employed, was found using statistical methods and TCAD.\",\"PeriodicalId\":20510,\"journal\":{\"name\":\"Proceedings International Symposium on Quality Electronic Design\",\"volume\":\"68 1\",\"pages\":\"337-340\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-03-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings International Symposium on Quality Electronic Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISQED.2002.996769\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings International Symposium on Quality Electronic Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISQED.2002.996769","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design of ESD protection device using statistical methods
This paper describes an ESD protection device design to minimize its area A/sub p/ while maintaining the breakdown voltage V/sub ESD/. Hypothesis tests were performed to find the applied surge condition and to select control factors for the design-of-experiments (DOE). Also, TCAD was used to estimate V/sub ESD/. An optimum device structure, where a salicide block was employed, was found using statistical methods and TCAD.
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