用于MEMS光学扫描仪的时间复用静电驱动和采样接口电路

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659039

S. Maruyama, T. Konishi, K. Machida, N. Ishihara, K. Masu, H. Fujita, H. Toshiyoshi

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引用次数: 0

摘要

我们报告了一种接口IC(集成电路)，通过在短于机械响应时间的时间内以时间复用的方式将致动器端口切换到驱动器或电荷传感电路，以静电驱动和测量倾斜镜角，以最大限度地减少传感干扰。

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A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners

We report an interface IC (integrated circuit) to electrostatically drive and measure the tilt-mirror angle by switching the actuator's port to either the driver or charge-sensing circuit in a time-multiplex manner in a period shorter than the mechanical response time to minimize the disturbance of sensing.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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