K. Haddadi, O. Haenssler, C. Boyaval, D. Théron, G. Dambrine
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Near-field scanning millimeter-wave microscope combined with a scanning electron microscope
The design, fabrication and experimental validation of a novel near-field scanning millimeter-wave microscope (NSMM) built inside a scanning electron microscope (SEM) is presented. The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of a sample with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.
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