激光器件用InGaAs-InGaAsP多量子阱的光致发光研究

E. Rao, A. Ougazzaden, Y. Gao, H. Thibierge, A. Pougnet, A. Mircea, E. Lugagne-Delpond, P. Voisin
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引用次数: 0

摘要

讨论了InGaAs-InGaAsP多量子阱(MQW)结构在约1.55 μ m波长区域发射激光器件的光致发光特性。不同的PL技术,如用于研究界面质量的光谱分析,用于记录峰值强度分布的空间和光谱分辨制图测量,以及用于缺陷检测的大面积地形,已被应用于监测生长和加工结构的性质。在建立了良好的生长结构后,表明实现激光器件的第二次外延生长顺序或再生长是关键的加工步骤,其优化应考虑Zn杂质的掺杂水平。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Photoluminescence investigation of InGaAs-InGaAsP multiquantum wells for laser devices
The photoluminescence (PL) properties of InGaAs-InGaAsP multiquantum well (MQW) structures for laser devices emitting in the approximately 1.55 mu m wavelength region are discussed. Different PL techniques, such as spectral analysis for studying interface quality, spatially and spectrally resolved cartography measurements for recording peak intensity distributions, and large-area topography for defect detection, have been applied to monitor the properties of as-grown and processed structures. After establishing the good quality of the as-grown structures, it is shown that the second epitaxial growth sequence or re-growth for realizing laser devices is a crucial processing step and that its optimization should take into consideration the doping level of Zn impurity.<>
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