Study of Fabricated System Based on Nanosecond Pulse Laser

Laser machining systems have been widely applied in micro-fabrication process development for 20 years. The current availability of nanosecond pulse UV laser sources is broadening the applications of laser micro-processing. In this work we present main features and potential applications of an integrative nanosecond pulse laser micro-machining numerical control system. Nanosecond Pulse Ultraviolet Laser (355nm) machining is an important method for developing micro structures. According to the special need for micro-machining, we designed a NC system based on PCI bus and FPGA technologies. This system consists of a 3-D motion platform including a displacement signal feedback system with accuracy of 1 um, a CCD (Charge Coupled Device) monitor and a workstation. After briefly describing the laser machining system, some micro structures were fabricated with different laser parameters. And a morphological characteristic is evaluated by optical microscopy. Keywords-NC system, nanosecond pulse UV laser,micromachining, silicon, ceramic, copper