基于纳秒脉冲激光的制式系统研究

Fengming Sun, Xing Fu, Zhiyuan Zhou, Yong Wu, Chunyang Liu
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引用次数: 0

摘要

激光加工系统在微细加工工艺发展中得到了广泛的应用。目前纳秒脉冲紫外激光源的出现正在拓宽激光微加工的应用领域。本文介绍了一种集成纳秒脉冲激光微加工数控系统的主要特点和潜在应用。纳秒脉冲紫外激光(355nm)加工是研究微结构的重要方法。根据微加工的特殊需要,设计了一种基于PCI总线和FPGA技术的数控系统。该系统由三维运动平台组成,包括精度为1 μ m的位移信号反馈系统、CCD(电荷耦合器件)监视器和工作站。在简要介绍了激光加工系统的基础上,用不同的激光参数加工了一些微结构。并用光学显微镜对其形态特征进行了评价。关键词:数控系统,纳秒脉冲紫外激光,微加工,硅,陶瓷,铜
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of Fabricated System Based on Nanosecond Pulse Laser
Laser machining systems have been widely applied in micro-fabrication process development for 20 years. The current availability of nanosecond pulse UV laser sources is broadening the applications of laser micro-processing. In this work we present main features and potential applications of an integrative nanosecond pulse laser micro-machining numerical control system. Nanosecond Pulse Ultraviolet Laser (355nm) machining is an important method for developing micro structures. According to the special need for micro-machining, we designed a NC system based on PCI bus and FPGA technologies. This system consists of a 3-D motion platform including a displacement signal feedback system with accuracy of 1 um, a CCD (Charge Coupled Device) monitor and a workstation. After briefly describing the laser machining system, some micro structures were fabricated with different laser parameters. And a morphological characteristic is evaluated by optical microscopy. Keywords-NC system, nanosecond pulse UV laser,micromachining, silicon, ceramic, copper
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