等离子体处理黑色二氧化钛薄膜

IF 0.5 Q4 PHYSICS, NUCLEAR

Problems of Atomic Science and Technology Pub Date : 2023-08-21 DOI:10.46813/2023-146-180

E. Frolova, V. Khomych, R. M. Kravchuk, O. Kolomys, Yu. M. Gudenko, O. Pylypchuk, V. Styopkin, A. Dobrovolskiy

{"title":"等离子体处理黑色二氧化钛薄膜","authors":"E. Frolova, V. Khomych, R. M. Kravchuk, O. Kolomys, Yu. M. Gudenko, O. Pylypchuk, V. Styopkin, A. Dobrovolskiy","doi":"10.46813/2023-146-180","DOIUrl":null,"url":null,"abstract":"The results of the treatment of TiO2 film in volume discharge with an Ar/H2 mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment.","PeriodicalId":54580,"journal":{"name":"Problems of Atomic Science and Technology","volume":"140 1","pages":""},"PeriodicalIF":0.5000,"publicationDate":"2023-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"PLASMA TREATMENT OF TITANIUM DIOXIDE FILM FOR BLACK TiO2\",\"authors\":\"E. Frolova, V. Khomych, R. M. Kravchuk, O. Kolomys, Yu. M. Gudenko, O. Pylypchuk, V. Styopkin, A. Dobrovolskiy\",\"doi\":\"10.46813/2023-146-180\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The results of the treatment of TiO2 film in volume discharge with an Ar/H2 mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment.\",\"PeriodicalId\":54580,\"journal\":{\"name\":\"Problems of Atomic Science and Technology\",\"volume\":\"140 1\",\"pages\":\"\"},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2023-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Problems of Atomic Science and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.46813/2023-146-180\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, NUCLEAR\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Problems of Atomic Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.46813/2023-146-180","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, NUCLEAR","Score":null,"Total":0}

引用次数: 0

摘要

介绍了用Ar/H2混合气体体积放电处理TiO2薄膜的实验结果。处理后的薄膜显示出透明度和导电性的变化。拉曼光谱显示等离子体处理后膜的相态没有变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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PLASMA TREATMENT OF TITANIUM DIOXIDE FILM FOR BLACK TiO2

The results of the treatment of TiO2 film in volume discharge with an Ar/H2 mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment.

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来源期刊

Problems of Atomic Science and Technology 物理-核科学技术

CiteScore

0.70

自引率

50.00%

发文量

审稿时长

2-4 weeks

期刊介绍： The journal covers the following topics: Physics of Radiation Effects and Radiation Materials Science; Nuclear Physics Investigations; Plasma Physics; Vacuum, Pure Materials and Superconductors; Plasma Electronics and New Methods of Acceleration.