CVD金刚石上的后向散射- cars

J. Bühler, Y. Prior
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引用次数: 0

摘要

化学气相沉积法生长金刚石在过去几年中得到了发展,并已在工业上得到商业化应用。由于其许多特性的优越性,金刚石薄膜的应用可以在工具工业(例如耐磨涂层),半导体工业(例如导热基板)和光学工业(坚固的光学涂层)中找到。然而,早期成核阶段仍未完全了解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Backscattering-CARS on CVD Diamond
Diamond Growth by Chemical Vapor Deposition has developed in the last years to the point of being commercially used in industrial applications1). Due to the superiority of many of its properties, applications of diamond films can be found in the tool industry (e.g. wear resistant coatings), semiconductor industry (e.g. heat conductive substrates) and optical industry (sturdy optical coatings). The early nucleation stages, however, are still not fully understood.
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