热丝法生长的Nc-Si:H薄膜光电探测器的优异响应和恢复时间

Vijaya Jadkar, Amit Pawbake, A. Jadhavar, R. Waykar, Subhash M. Pandharkar, Ajinkya Bhorde, R. Aher, Shruthi Nair, Bharat B. Gabhale, A. Waghmare, Dhirsing Naik, Priti Vairale, S. Gosavi, S. Jadkar
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引用次数: 1

摘要

本研究采用热丝法合成了高结晶氢化纳米硅(nc-Si:H)薄膜。采用低角xrd、拉曼光谱、非接触原子力显微镜(NC-AFM)和紫外-可见光谱对薄膜进行了表征。低角xrd分析表明,制备的nc-Si:H薄膜是多晶的,具有沿(111)方向的择优取向。通过拉曼光谱分析进一步证实了nc-Si:H薄膜的形成。紫外可见光谱分析表明,合成膜在可见光区有明显的吸收边,直接带隙为1。94 eV。最后,在优化的工艺参数下制备了基于nc-Si:H的光电探测器,其响应时间为1.79 s
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Excellent Response and Recovery Time of Photo-Detectors Based on Nc-Si:H Films Grown by Using Hot Wire Method
In present study we have synthesized highly crystalline hydrogenated nanocrystalline silicon (nc-Si:H) thin films by hot wire method. The obtained thin films were characterized by using low angle-XRD, Raman spectroscopy, non-contact atomic force microscopy (NC-AFM) and UV-Visible spectroscopy. The low angle-XRD analysis revealed that the obtained nc-Si:H thin films are polycrystalline and have preferred orientation along (111) direction. Formation of nc-Si:H films are further confirmed by Raman spectroscopy analysis. The UV-Visible spectroscopy analysis showed that the synthesized films have sharp absorption edge in visible region and has direct band gap of 1. 94 eV. Finally, nc-Si:H based photo-detector have been prepared at optimized process parameters which show an excellent response time (1.79 s) and
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