控制电阻，提高纳米晶氧化锡气敏厚膜的灵敏度

Proceedings of IEEE Sensors, 2004. Pub Date : 2004-12-01 DOI:10.1109/ICSENS.2004.1426260

Sung‐Jei Hong, D. Moon, J. Han, Sang-Gweon Chang, M. Huh

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引用次数: 0

摘要

通过控制其电阻，成功地提高了纳米氧化锡气敏厚膜的灵敏度。为了精确控制电阻，采用低温催化剂掺杂(LTCD)方法，在300/spl℃以下将Pt催化剂掺杂到纳米氧化锡颗粒上。此外，利用尺寸小于10nm的纳米氧化锡颗粒制备了气敏厚膜，提高了对甲烷气体的灵敏度。即在氧化锡颗粒上掺杂5wt%的Pt催化剂，在400/spl℃下时效5h后，获得了良好稳定的灵敏度(R/sub 3500//R/sub 1000/) 0.64。

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Control of resistance to enhance the sensitivity of nanocrystalline tin oxide gas sensitive thick film

The sensitivity of a nanocrystalline tin oxide gas sensitive thick film was successfully enhanced by controlling its resistance. For the precise control of the resistance, low temperature catalyst doping (LTCD) method was applied below 300/spl deg/C to dope a Pt catalyst onto nanocrystalline tin oxide particles. Also, a gas sensitive thick film was fabricated using the nanocrystalline tin oxide particles having a size smaller than 10 nm, and it led to an enhanced sensitivity with respect to methane gas. That is, a good and stable sensitivity (R/sub 3500//R/sub 1000/) of 0.64 was achieved after aging for 5 hours at 400/spl deg/C by doping with 5wt% of Pt catalyst onto the tin oxide particle.

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Proceedings of IEEE Sensors, 2004.

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