化学处理降低Cd0.9Zn0.1Te表面电导率

L. Kanak, V. G. Ivanitska, A. Kanak, P. Fochuk
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引用次数: 0

摘要

研究了Cd0.9Zn0.1Te晶体预处理对钝化效果的影响。确定了最佳钝化工艺条件。调查前用Br2-DMF溶液处理Cd0.9Zn0.1Te样品。处理后的样品表面光滑,无明显的凹凸不平,表明该蚀刻液具有良好的抛光性能,为进一步研究提供了可能。采用NH4F-H2O2溶液对样品表面进行钝化。利用能量色散x射线光谱(EDX)对Cd0.9Zn0.1Te样品表面的定性和定量组成进行了研究。表面形成了均匀的氧化层。通过测量钝化样品的电流-电压依赖性,研究了钝化样品的电特性。证明了Cd0.9Zn0.1Te样品在NH4F-H2O2溶液中进行化学处理后,在50% KOH溶液中进行处理的方便性。结果表明,在蚀刻后,试样表面出现了过量的碲,导致表面电导率升高。对有KOH溶液和没有KOH溶液的预处理样品的电流-电压依赖性的测量表明,这一额外的化学处理步骤的应用导致样品表面电阻的显着增加。表面的视觉变化也被观察到。发现Cd0.9Zn0.1Te晶体表面钝化的最佳条件是在18℃的温度下,用NH4F-H2O2溶液进行2 min的化学处理。测量了样品Cd0.9Zn0.1Te在抛光后、蚀刻后和钝化后不同表面处理阶段的电流-电压特性。这是为了比较半导体表面质量对其电性能的总体影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reduction of the Cd0.9Zn0.1Te surface conductivity by chemical treatment
The influence of Cd0.9Zn0.1Te crystals pretreatment on the effectiveness of the passivation was studied. The optimal conditions of passivation process are determined. Samples of Cd0.9Zn0.1Te were treated with Br2-DMF solution before the investigation. After treatment the surface of the sample was smooth without visible irregularities, which indicates the good polishing properties of this etching solution and the possibility of using the samples for further study. Passivation of samples surface was carried by the NH4F-H2O2 solution. The qualitative and quantitative composition of the Cd0.9Zn0.1Te sample surface was investigated by means of energy-dispersive X-ray spectroscopy (EDX). The formation of a uniform oxide surface layer was confirmed. The electrical characteristics of the passivated samples were investigated by measurent the current-voltage dependences. The expediency of applying of the Cd0.9Zn0.1Te sample treatment in 50% KOH solution after their chemical treatment in the NH4F-H2O2 solution was proved. It was shown that after etching, excess tellurium appears on the surface of the specimens and causes increasing surface conductivity. Measurement of current-voltage dependencies for pre-treated specimens with and without KOH solution showed that the application of this additional chemical treatment step leads to a significant increase in the surface resistance of the specimen. Visual changes in the surface are also observed. It was found that the optimal conditions for Cd0.9Zn0.1Te crystals surface passivation are chemical treatment with NH4F-H2O2 solution for 2 min at a temperature of 18 °C. The current-voltage characteristics of the sample Cd0.9Zn0.1Te were measured at different stages of surface treatment: after polishing, after etching and after passivation. It was done for compares the overall effect of the semiconductor's surface quality on their electrical properties.
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