蓝紫色氮化镓基光子晶体表面发射激光器

洪国彬 Hong Kuo-bin, 杨钧杰 Yang Chun-chieh, 卢廷昌 Lu Tien-chang
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引用次数: 1

摘要

从实验和理论上研究了氮化镓基光子晶体表面发射激光器的光学特性。讨论了晶格常数、边界形状和晶格类型对光子晶体激光特性的影响。采用金属有机化学气相沉积、电子束光刻和电感耦合等离子体反应离子刻蚀技术制备了PCSEL结构。用角分辨光致发光系统测量了PCSEL的衍射图、发射光谱、发散角等光学特性。同时,利用平面波展开法和多次散射法分别计算了PCSELs的带图和阈值增益。结果表明,晶格常数对激光模式的选择起着重要的作用。尽管圆形和六角形PCSEL的激光波长和线宽几乎相同,但圆形PCSEL的阈值激发能密度为0。比六边形PCSEL小3 mJ /cm2。蜂窝晶格的PCSEL激发能密度较低,为1。6 mJ /cm2,发散角为1。3°。方形晶格的激发能密度是蜂窝晶格的两倍。总体结果表明,gan基PCSEL具有单模发射、低发散角等特点。另一方面,用MSM计算的数值结果与实验结果吻合较好。MSM是一种快速、经济的预测激光特性的方法。我们相信这些贡献为gan基PCSEL的发展提供了指导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Blue-Violet GaN-based photonic crystal surface emitting lasers
We experimentally and theoretically investigate the optical properties of GaN-based photonic crystal surface emitting lasers( PCSELs). We discuss the effects of lattice constant,boundary shape,and lattice type of photonic crystal( PC) on lasing characteristics. The PCSEL structures are fabricated using the metal-organic chemical vapor deposition,the electron beam lithography,and inductively coupled plasma reactive ion etching technique. The optical properties of PCSEL which include the diffraction pattern,emission spectrum,divergence angle and so on are measured by the angular-resolved photoluminescence system. Meanwhile,the plane wave expansion and multiple scattering method( MSM) are used to calculate the band diagram and threshold gain of PCSELs,respectively. The results reveal that the lattice constant plays an important role in selection of lasing mode. Despite the lasing wavelength and linewidth of circular and hexagonal shapes PCSELs are almost the same,the threshold excitation energy density of circular shape PCSEL is 0. 3 mJ /cm2 smaller than that ofhexagonal PCSEL. The PCSEL with honeycomb lattice shows the lower excitation energy density of1. 6 mJ /cm2 and divergence angle of 1. 3°. In case of square lattice,the excitation energy density is twice as large as that of honeycomb lattice. The overall results show that the single-mode emission,low divergence angle,and so on can be produced from GaN-based PCSEL. On the other hand,the numerical results calculated using the MSM are in good agreement with experimental results. The MSM could be a fast and cost-effective approach for predicting the lasing characteristic. We believe that these contributions provide guidance for the development of GaN-based PCSEL.
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