微工程用场致发射枪

Journal of Physics E: Scientific Instruments Pub Date : 1989-08-01 DOI:10.1088/0022-3735/22/8/014

A. Delong, V. Kolarik

{"title":"微工程用场致发射枪","authors":"A. Delong, V. Kolarik","doi":"10.1088/0022-3735/22/8/014","DOIUrl":null,"url":null,"abstract":"An electron gun has been designed for a TFE W 100 ZrO cathode with a magnetic lens for voltages up to 15 kV. The main fields of application are assumed to be electron beam lithography, electron beam diagnosis and analysis of microstructures.","PeriodicalId":16791,"journal":{"name":"Journal of Physics E: Scientific Instruments","volume":"132 1","pages":"612-614"},"PeriodicalIF":0.0000,"publicationDate":"1989-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Field emission gun for microengineering application\",\"authors\":\"A. Delong, V. Kolarik\",\"doi\":\"10.1088/0022-3735/22/8/014\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An electron gun has been designed for a TFE W 100 ZrO cathode with a magnetic lens for voltages up to 15 kV. The main fields of application are assumed to be electron beam lithography, electron beam diagnosis and analysis of microstructures.\",\"PeriodicalId\":16791,\"journal\":{\"name\":\"Journal of Physics E: Scientific Instruments\",\"volume\":\"132 1\",\"pages\":\"612-614\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Physics E: Scientific Instruments\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/0022-3735/22/8/014\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Physics E: Scientific Instruments","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0022-3735/22/8/014","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

设计了一种电子枪，用于电压高达15 kV的TFE w100 ZrO阴极，带有磁透镜。电子束的主要应用领域是电子束光刻、电子束诊断和微结构分析。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Field emission gun for microengineering application

An electron gun has been designed for a TFE W 100 ZrO cathode with a magnetic lens for voltages up to 15 kV. The main fields of application are assumed to be electron beam lithography, electron beam diagnosis and analysis of microstructures.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Journal of Physics E: Scientific Instruments

自引率

0.00%

发文量