{"title":"针对拉入电压的机电微系统拓扑优化","authors":"E. Lemaire, P. Duysinx, V. Rochus, J. Golinval","doi":"10.1109/ESIME.2006.1644038","DOIUrl":null,"url":null,"abstract":"The present work is dedicated to the application of topology optimization in the multiphysics field of MEMS. Precisely, it describes how it is possible to maximize pull-in voltage of an electromechanical microsystem for which the optimization domain is insulated from the electric field. The electromechanical coupling is modeled by the use of a monolithic analysis. The optimization task is completed with the help of a sequential convex linear approximation schemes (CONLIN)","PeriodicalId":60796,"journal":{"name":"微纳电子与智能制造","volume":"24 1","pages":"1-8"},"PeriodicalIF":0.0000,"publicationDate":"2006-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Topology optimization of electromechanical microsystems against pull-in voltage\",\"authors\":\"E. Lemaire, P. Duysinx, V. Rochus, J. Golinval\",\"doi\":\"10.1109/ESIME.2006.1644038\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The present work is dedicated to the application of topology optimization in the multiphysics field of MEMS. Precisely, it describes how it is possible to maximize pull-in voltage of an electromechanical microsystem for which the optimization domain is insulated from the electric field. The electromechanical coupling is modeled by the use of a monolithic analysis. The optimization task is completed with the help of a sequential convex linear approximation schemes (CONLIN)\",\"PeriodicalId\":60796,\"journal\":{\"name\":\"微纳电子与智能制造\",\"volume\":\"24 1\",\"pages\":\"1-8\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-04-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"微纳电子与智能制造\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1109/ESIME.2006.1644038\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"微纳电子与智能制造","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ESIME.2006.1644038","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Topology optimization of electromechanical microsystems against pull-in voltage
The present work is dedicated to the application of topology optimization in the multiphysics field of MEMS. Precisely, it describes how it is possible to maximize pull-in voltage of an electromechanical microsystem for which the optimization domain is insulated from the electric field. The electromechanical coupling is modeled by the use of a monolithic analysis. The optimization task is completed with the help of a sequential convex linear approximation schemes (CONLIN)
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