锡溶液熔体中Si1-x-yGexSny固溶体外延层的生长

IF 0.4 Q4 MATHEMATICS
A. Razzokov
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引用次数: 0

摘要

采用液相外延技术,在500 ~ 1100℃的温度范围内,在Si衬底上生长出了Si1-x-yGexSny梯度隙固溶体单晶薄膜。用扫描电镜测定了外延膜的化学成分。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth of Epitaxial Layers of the Si1-x-yGexSny Solid Solution from a Tin Solution-Melt
Mono-crystal films of a graded-gap solid solution Si1-x-yGexSny on Si <111>substrates were grown by liquid-phase epitaxy from a limited tin solution-melt in the temperature range 500–1100 °C. The chemical composition of the grown epitaxial films was determined using a scanning electron microscope.
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来源期刊
CiteScore
0.90
自引率
0.00%
发文量
26
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