大面积多晶硅埋接触太阳电池序列的工艺改进

Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC) Pub Date : 1994-12-05 DOI:10.1109/WCPEC.1994.520189

S. Narayanan, J. Creager, S. Roncin, A. Rohatgi, Z. Chen

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引用次数: 6

摘要

Solarex正在进行的研究的目标之一是发展与大批量生产兼容的工艺序列，同时降低埋藏接触电池的处理成本。本文讨论了磷捕集的影响以及比SiO/ sub2 /高折射率增透涂层的应用。据报道，由于磷的捕集和二氧化钛增透涂层的掺入，埋地接触电池的效率有了实质性的提高。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Process improvements for large area polycrystalline silicon buried contact solar cell sequence

One of the objectives of ongoing research at Solarex is to evolve process sequences that are compatible with high volume production, while reducing the processing cost of buried contact cells. In the paper, the impact of phosphorus gettering and the application of an antireflection coating with a higher refractive index than that of SiO/sub 2/ are discussed. Substantial improvement in the efficiency of the buried contact cells due to phosphorus gettering and incorporation of titanium dioxide antireflection coating is reported.

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来源期刊

Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC)

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