{"title":"磁致动摆动式微镜","authors":"H. Chang, Chun-Wei Tsai, Shih-Hsiang Liu, J. Tsai","doi":"10.1109/OMN.2013.6659064","DOIUrl":null,"url":null,"abstract":"This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"3 1","pages":"71-72"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Magnetically actuated swing-type micromirror\",\"authors\":\"H. Chang, Chun-Wei Tsai, Shih-Hsiang Liu, J. Tsai\",\"doi\":\"10.1109/OMN.2013.6659064\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.\",\"PeriodicalId\":6334,\"journal\":{\"name\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"3 1\",\"pages\":\"71-72\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2013.6659064\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659064","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.
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