CuInS2薄膜某些物理性质随衬底温度的变化

A. S. Meshram, Y. D. Tembhurkar, O. Chimankar
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引用次数: 0

摘要

摘要喷雾热解是制备大面积半导体薄膜最方便、经济、廉价、简单的方法之一。利用氯化铜、三氯化铟和0.02 M硫脲的水溶液,在275 ~ 350℃范围内改变衬底温度,在玻璃衬底上沉积了半导体三元CuInS2薄膜,这似乎是影响半导体物理性能的重要参数之一。采用Cu Kα(波长= 1.5418 Å)辐射的Bruker AXS D8 Advance x射线衍射(XRD)技术,计算了所有样品在室温下的晶格参数a和c。四探针法和热探针法测定的薄膜电导率均为ptype电导率。由于温度的影响,在250、300和350℃制备的样品中,原子在化合物中排列有序。由于薄膜没有被故意掺杂,因此观察到在本征性质上的缺陷是由硫隙产生的。用扫描电镜研究了晶粒尺寸。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Variation of some physical properties of CuInS2 films by substrate temperature
Received: 21/Mar/2019, Accepted: 11/Apr/2019, Online: 30/Apr/2019 AbstractSpray pyrolysis is one of the most convenient, economical, inexpensive and simple methods for depositing large area semiconducting thin films. Semiconducting ternary CuInS2 thin films have been deposited onto the glass substrate by varying substrate temperature from 275 0 C, at the interval of 25 to 350 0 C by using aqueous solution of Cupric chloride, Indium trichloride and thiourea of 0.02 M and Seems to be one of the more important parameters affecting the physical properties of the semiconductor. The lattice parameter a and c at room temperature of the tetragonal unit cell were calculated for all these samples by Bruker AXS D8 Advance X-ray diffraction (XRD) techniques with Cu Kα (wavelength = 1.5418 Å) radiation.Conductivity of thin films determined by Four Probe method and hot probe technique wasdetermined to exhibit ptype conductivity. Due to temperature effect, shows the atoms are arrange regular in compound of these samples prepared at various temperatures 250, 300 and 350 0 C. As the films are not doped intentionally defect observed in intrinsic nature operative to be produced by Sulphur interstitials. Grain sizes were studied by Scanning Electron Microscope.
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