阴极溅射辉光放电等离子体中镁离子电离的离子原子吸收光谱研究

Plasmas & Ions Pub Date : 1999-10-01 DOI:10.1016/S1288-3255(99)00108-2

You Jinglin , Wang Zhenshu , Zhang Gongshu , Ren Jianshi , Jiang Guochang

{"title":"阴极溅射辉光放电等离子体中镁离子电离的离子原子吸收光谱研究","authors":"You Jinglin , Wang Zhenshu , Zhang Gongshu , Ren Jianshi , Jiang Guochang","doi":"10.1016/S1288-3255(99)00108-2","DOIUrl":null,"url":null,"abstract":"<div><p>Ionic and atomic absorption spectrometries were used to study magnesium ionization in cathodic sputtering glow discharge (CSGD) plasma with aluminum–magnesium alloys as cathodes. A method, based on Doppler broadening-dependent absorption width, of ionization degree resolution by relative absorbance is proposed. The experimental results reveal that there are plentiful magnesium ions in the plasma under the conventional discharge conditions of the atomizer. The matrix element aluminum shows preferential ionization and restricts that of magnesium. Also magnesium ionization degree increases with the discharge power but decreases with the distance from the cathode.</p></div>","PeriodicalId":101031,"journal":{"name":"Plasmas & Ions","volume":"2 3","pages":"Pages 127-132"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S1288-3255(99)00108-2","citationCount":"0","resultStr":"{\"title\":\"Ionic and atomic absorption spectroscopic study of magnesium ionization in cathodic sputtering glow discharge plasma\",\"authors\":\"You Jinglin , Wang Zhenshu , Zhang Gongshu , Ren Jianshi , Jiang Guochang\",\"doi\":\"10.1016/S1288-3255(99)00108-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Ionic and atomic absorption spectrometries were used to study magnesium ionization in cathodic sputtering glow discharge (CSGD) plasma with aluminum–magnesium alloys as cathodes. A method, based on Doppler broadening-dependent absorption width, of ionization degree resolution by relative absorbance is proposed. The experimental results reveal that there are plentiful magnesium ions in the plasma under the conventional discharge conditions of the atomizer. The matrix element aluminum shows preferential ionization and restricts that of magnesium. Also magnesium ionization degree increases with the discharge power but decreases with the distance from the cathode.</p></div>\",\"PeriodicalId\":101031,\"journal\":{\"name\":\"Plasmas & Ions\",\"volume\":\"2 3\",\"pages\":\"Pages 127-132\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/S1288-3255(99)00108-2\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasmas & Ions\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1288325599001082\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas & Ions","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1288325599001082","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

采用离子吸收光谱和原子吸收光谱研究了铝镁合金阴极溅射辉光放电等离子体中镁离子的电离。提出了一种基于多普勒增宽-依赖于吸收宽度的相对吸光度电离度分辨方法。实验结果表明，在雾化器常规放电条件下，等离子体中存在丰富的镁离子。基体元素铝表现出优先电离，限制了镁的电离。镁离子的电离度随放电功率的增大而增大，随离阴极距离的增大而减小。

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Ionic and atomic absorption spectroscopic study of magnesium ionization in cathodic sputtering glow discharge plasma

Ionic and atomic absorption spectrometries were used to study magnesium ionization in cathodic sputtering glow discharge (CSGD) plasma with aluminum–magnesium alloys as cathodes. A method, based on Doppler broadening-dependent absorption width, of ionization degree resolution by relative absorbance is proposed. The experimental results reveal that there are plentiful magnesium ions in the plasma under the conventional discharge conditions of the atomizer. The matrix element aluminum shows preferential ionization and restricts that of magnesium. Also magnesium ionization degree increases with the discharge power but decreases with the distance from the cathode.

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Plasmas & Ions

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