基于FEM的低交叉轴灵敏度微机械加速度计设计与仿真

微纳电子与智能制造 Pub Date : 2006-04-24 DOI:10.1109/ESIME.2006.1644047

R. Mukhiya, A. Adami, A. Bagolini, M. Zen, S. Kal

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引用次数: 5

摘要

本文报道了用于汽车单轴低g (plusmn2g)的两个MEMS压阻式加速度计的设计和仿真。这两种加速度计结构都由顶部的四根梁和八个嵌入式电阻作为传感元件组成，形成惠斯通电桥网络，并相互连接以最小化交叉轴灵敏度。利用市售MEMSCAD工具CoventorWarereg对两种加速度计进行了基于FEM的设计和仿真，并进行了比较。讨论了实现这两种结构的制造过程和技术问题。两种加速度计的灵敏度分别为6.5 mV/g和5.85 mV/g。结构的横轴灵敏度比原轴灵敏度低3个数量级

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FEM Based Design and Simulation of Bulk Micromachined MEMS Accelerometers with Low Cross Axis Sensitivity

This paper reports the design and simulation of two MEMS piezoresistive accelerometers for single axis low g (plusmn2g) automotive applications. Both the accelerometer structures consist of four beams at the top with eight embedded resistors as sensing elements to form Wheatstone bridge network and interconnected to minimize the cross axis sensitivity. FEM based design and simulation results for both the accelerometers are presented and compared, which are performed using commercially available MEMSCAD tool CoventorWarereg. Fabrication process and technological aspects to realize both the structures are discussed. The sensitivity of the two accelerometers is 6.5 mV/g and 5.85 mV/g respectively. Cross axis sensitivity of the structures is three orders lower than the prime axis sensitivity

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来源期刊

微纳电子与智能制造

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发文量

145