多通道化学传感器采用表面声波装置

1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118) Pub Date : 1997-10-05 DOI:10.1109/ULTSYM.1997.663053

T. Nomura, A. Saitoh, S. Furukawa

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引用次数: 0

摘要

多通道SAW化学传感器是一种用于有机气体检测的分析系统。SAW传感器具有高频特性，可以在衬底上形成多通道器件。这些特性提高了传感器的灵敏度，并使传感器能够集成。在本文中，我们提出了一种新的化学传感器系统，采用多通道SAW器件。在一个压电衬底上设计并制作了四通道SAW延迟线。每个通道被不同的选择性有机薄膜覆盖，每个通道的输出被用来制作响应模式。对气味溶剂的响应表现出不同的分析物特异性模式。

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Multi-channel chemical sensor using surface acoustic wave device

Multi-channel SAW chemical sensor is used as an analytical system for organic gas detection. SAW sensors show a high frequency property, and can become multi-channel devices on a substrate. The features improve sensor sensitivity and enable integration of the sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of each channel was used to make a response pattern. The response to odorant solvents showed different analyte specific patterns.

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来源期刊

1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)

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