{"title":"硅衬底上的集成ScAlN光子电路","authors":"Shiyang Zhu, Qize Zhong, Nanxi Li, Ting Hu, Yuan Dong, Zhengji Xu, Yanyan Zhou, Y. Fu, Navab Singh","doi":"10.1364/cleo_si.2020.stu3p.5","DOIUrl":null,"url":null,"abstract":"ScAlN has been applied in piezoelectric micro-electro-mechanical systems, while application in photonics remains unexplored. Here, ScAlN photonic circuits on silicon are presented, demonstrating waveguide propagation loss of 9±2 dB/cm and microring quality factor of 1.4×104.","PeriodicalId":6719,"journal":{"name":"2020 Conference on Lasers and Electro-Optics (CLEO)","volume":"23 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Integrated ScAlN Photonic Circuits on Silicon Substrate\",\"authors\":\"Shiyang Zhu, Qize Zhong, Nanxi Li, Ting Hu, Yuan Dong, Zhengji Xu, Yanyan Zhou, Y. Fu, Navab Singh\",\"doi\":\"10.1364/cleo_si.2020.stu3p.5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ScAlN has been applied in piezoelectric micro-electro-mechanical systems, while application in photonics remains unexplored. Here, ScAlN photonic circuits on silicon are presented, demonstrating waveguide propagation loss of 9±2 dB/cm and microring quality factor of 1.4×104.\",\"PeriodicalId\":6719,\"journal\":{\"name\":\"2020 Conference on Lasers and Electro-Optics (CLEO)\",\"volume\":\"23 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 Conference on Lasers and Electro-Optics (CLEO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/cleo_si.2020.stu3p.5\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/cleo_si.2020.stu3p.5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Integrated ScAlN Photonic Circuits on Silicon Substrate
ScAlN has been applied in piezoelectric micro-electro-mechanical systems, while application in photonics remains unexplored. Here, ScAlN photonic circuits on silicon are presented, demonstrating waveguide propagation loss of 9±2 dB/cm and microring quality factor of 1.4×104.
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