高温等离子体氮化钛的机理

Edward Roliński
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引用次数: 31

摘要

本文介绍了钛在1030℃氮气中等离子体氮化的研究结果。在氮化过程中,将平面试样放置在阴极上,在处理完成后,分析其上下表面产生的层之间的差异。渗氮层在试样两侧厚度相同。试样上表面形成的层的显微硬度和耐15% H2SO4腐蚀性能均高于下表面形成的层。造成这些差异的原因是下层被碳污染了。碳的加入也使氮化TiN的晶格参数增大。氮离子在试样上表面的作用导致表面溅射并去除碳的污染。因此,在上表面产生的氮化层含有较少的杂质,具有较好的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mechanism of high-temperature plasma nitriding of titanium

The paper presents the results of studies on plasma nitriding of titanium in nitrogen at 1030°C. For the nitriding process, flat specimens were placed on the cathode and, after the treatment had been carried out, they were analyzed for differences between the layers produced on their upper and lower surfaces. The nitrided layers have the same thickness on both sides of the specimens. Microhardness and corrosion resistance in 15% H2SO4 of the layers produced on the upper surfaces are higher than those of the layers formed on the lower surfaces of the specimens.

The reason for these differences is the contamination of the lower layer by carbon. Carbon also causes an increase in the value of the lattice parameter of the TiN nitride.

The action of nitrogen ions on the upper surface of the specimens entails sputtering of the surface and removes the contamination by carbon.

For this reason, the nitrided layer produced on the upper surface contains less impurities and has better properties.

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