类金刚石碳涂层在改善II-VI器件性能中的应用

R. Savkina, Aleksej Smirnov, Anatoly Luk`yanov, Dmytro Golyachenko, N. Voloshin, R. Grill
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引用次数: 1

摘要

本文的主要目的是突出我们在DLC薄膜的合成,表征和应用方面的成就,以改进ii - vi基辐射探测器。通过降低薄膜应力和用氩等离子体对衬底表面进行附加处理,获得了与衬底具有稳定粘附接触的“软”聚合物类a- c:H:N薄膜。我们考虑了调整碳基材料性能的方法,以创建光学或保护涂层,并应用a- c:H:N薄膜作为基于II-VI材料的红外和伽马辐射探测器的钝化涂层。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Diamond-like Carbon Coating in Improving the Perfomance of II-VI Devices
The primary goal of this paper is to highlight our achievement in the synthesis, characterization and application of DLC films for II-VI-based radiation detector improvement. “Soft” polymer-like a-C:H:N films with a stable adhesive contact to substrate, which is achieved both by lowering in the film stress, and by the additional treatment of the substrate surface with argon plasma, were obtained by PECVD method. We considered ways to adjust the properties of carbon-based materials to create an optical or protective coatings and applied a-C:H:N film as a passivation coating of IR and gamma radiation detectors based on II-VI materials.
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