短毫米波用聚四氟乙烯基板集成波导巴特勒矩阵的设计与制造

IEICE Trans. Electron. Pub Date : 2023-01-01 DOI:10.1587/transele.2022ecs6003

M. Kishihara, Kaito Fujitani, A. Yamaguchi, Y. Utsumi, I. Ohta

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引用次数: 0

摘要

摘要采用同步辐射(SR)直接刻蚀聚四氟乙烯(PTFE)衬底集成波导(SIW)的微加工工艺，通过溅射沉积添加金属膜，设计并制备了短毫米波频率的4 × 4 Butler矩阵。首先，使用矩形通孔用于g波段(140-220 GHz)操作的PTFE SIW的尺寸确定，十字形90◦混合耦合器和交叉电路由PTFE SIW连接，以设计巴特勒矩阵。然后，进行试制。最后，通过对辐射方向图的测量，验证了设计结果和制作工艺的有效性。关键词:微结构，x射线光刻，介质加载波导

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Design and Fabrication of PTFE Substrate-Integrated Waveguide Butler Matrix for Short Millimeter Waves

SUMMARY We attempt to design and fabricate of a 4 × 4 Butler matrix for short-millimeter-wave frequencies by using the microfabrication process for a polytetraﬂuoroethylene (PTFE) substrate-integrated waveguide (SIW) by the synchrotron radiation (SR) direct etching of PTFE and the addition of a metal ﬁlm by sputter deposition. First, the dimensions of the PTFE SIW using rectangular through-holes for G-band (140-220 GHz) operation are determined, and a cruciform 90 ◦ hybrid coupler and an inter-section circuit are connected by the PTFE SIW to design the Butler matrix. Then, a trial fabrication is performed. Finally, the validity of the design result and the fabrication process is veriﬁed by measuring the radiation pattern. key words: microstructure, X-ray lithography, dielectric loaded waveguides

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IEICE Trans. Electron.

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