1µm CMOS工艺制备locos型LDMOS晶体管的UIS表征

A. Houadef, B. Djezzar
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引用次数: 1

摘要

本文研究了n型LDMOS在单次无箝位电感开关(UIS)应力条件下的坚固性。我们提出了一种详细的方法来定义电热安全操作区域(SOA),并描述了失效机制的物理原理。我们得出的结论是,器件的鲁棒性主要取决于栅极偏置,而较少取决于毫秒范围内的脉冲持续时间,电感负载值或初始工作温度,尽管柯克效应在所有条件下始终存在。然而,在短脉冲作用下,破坏机制从根本上转变为纯雪崩击穿。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
UIS Characterization of LOCOS-Based LDMOS Transistor Fabricated by 1 µm CMOS Process
This paper investigates the ruggedness of an n-type LDMOS under single shot unclamped inductive switching (UIS) stress conditions. We present a detailed method to define the electrothermal safe operating area (SOA), and the physics of the failure mechanism is described. We conclude that the device robustness depends mainly on the gate bias, much less on the pulse duration on millisecond range, the inductive load value, or the initial operating temperature, although the Kirk effect is always present under all conditions. However, the failure mechanism fundamentally changes to pure avalanche breakdown under short pulses.
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