基于COMSOL Multiphysics的SAW延迟线传感器建模与仿真

Bilel Achour, N. Aloui, N. Fourati, C. Zerrouki, N. Yaakoubi
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引用次数: 1

摘要

利用COMSOL Multiphysics软件对表面声波(SAW)传感器进行了二维和三维有限元模拟。在压电衬底上设计了声表面波器件;36°rot钽酸锂(LiTaO3)。在已知结构上进行了仿真,以确保二维和三维模型之间的一致性,并定义了一个可以解释和预测SAW换能器电气行为的二维模型,以便于未来的优化。结果表明,数值模拟与实验S21光谱吻合较好。因此,我们可以使用二维模型进行模拟,以优化器件的结构,主要是为了提高它们的灵敏度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling and simulation of SAW delay line sensors with COMSOL Multiphysics
This study concerns 2D and 3D Finite Element Method (FEM) simulation of surface acoustic wave (SAW) sensors using COMSOL Multiphysics software. SAW device has been designed on piezoelectric substrate; 36° rot lithium tantalate (LiTaO3). Simulations were made on well-known structure to ensure the concordance between 2D and 3D models, and to define a 2D one that can account for and predict the electrical behaviour of SAW transducers for the future optimizations. The results show good agreement between numerical simulation and experimental S21 spectra. Accordingly, we can use the 2D built model for simulations intended to optimize the structure of devices, mainly for increasing their sensitivity.
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