{"title":"改进标准丝网印刷技术，用于加工独立的物理和化学传感器","authors":"H. Debéda, C. Lucat","doi":"10.1109/ICSENS.2014.6985450","DOIUrl":null,"url":null,"abstract":"Though silicon technology allows the processing of MEMS, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film MEMS is studied through the association of the sacrificial layer process to the well-known screen-printing technology used for the fabrication of low cost components and microelectronic circuits. Organic and inorganic microstructures are successfully fabricated and tested for force, vibration or gas detection.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"1 3 1","pages":"2097-2100"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Modified standard screen-printing technology for processing of free-standing physical and chemical sensors\",\"authors\":\"H. Debéda, C. Lucat\",\"doi\":\"10.1109/ICSENS.2014.6985450\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Though silicon technology allows the processing of MEMS, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film MEMS is studied through the association of the sacrificial layer process to the well-known screen-printing technology used for the fabrication of low cost components and microelectronic circuits. Organic and inorganic microstructures are successfully fabricated and tested for force, vibration or gas detection.\",\"PeriodicalId\":13244,\"journal\":{\"name\":\"IEEE SENSORS 2014 Proceedings\",\"volume\":\"1 3 1\",\"pages\":\"2097-2100\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-12-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE SENSORS 2014 Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2014.6985450\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE SENSORS 2014 Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2014.6985450","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Modified standard screen-printing technology for processing of free-standing physical and chemical sensors
Though silicon technology allows the processing of MEMS, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film MEMS is studied through the association of the sacrificial layer process to the well-known screen-printing technology used for the fabrication of low cost components and microelectronic circuits. Organic and inorganic microstructures are successfully fabricated and tested for force, vibration or gas detection.
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