微波温度传感器

G. Mansfeld, S. Alekseev, I. Kotelyansky, A. G. Kirillov, V. Veretin
{"title":"微波温度传感器","authors":"G. Mansfeld, S. Alekseev, I. Kotelyansky, A. G. Kirillov, V. Veretin","doi":"10.1109/ICSENS.2004.1426310","DOIUrl":null,"url":null,"abstract":"The paper studies the possibility of using microwave high overtone bulk acoustic wave resonators (HBAR) in temperature sensors in liquids. The shear 430 MHz BAW are excited in the resonator structure providing high temperature sensitivity and relatively low harmful mechanical sensitivity of sensor on ambient liquid media. The new technical suggestion is that the resonator is acoustically isolated and protected from the mechanical influence of ambient media by multilayer Bragg quarter-wavelength thin film reflectors.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":"38 1","pages":"876-878 vol.2"},"PeriodicalIF":0.0000,"publicationDate":"2004-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"BAW microwave temperature sensor\",\"authors\":\"G. Mansfeld, S. Alekseev, I. Kotelyansky, A. G. Kirillov, V. Veretin\",\"doi\":\"10.1109/ICSENS.2004.1426310\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper studies the possibility of using microwave high overtone bulk acoustic wave resonators (HBAR) in temperature sensors in liquids. The shear 430 MHz BAW are excited in the resonator structure providing high temperature sensitivity and relatively low harmful mechanical sensitivity of sensor on ambient liquid media. The new technical suggestion is that the resonator is acoustically isolated and protected from the mechanical influence of ambient media by multilayer Bragg quarter-wavelength thin film reflectors.\",\"PeriodicalId\":20476,\"journal\":{\"name\":\"Proceedings of IEEE Sensors, 2004.\",\"volume\":\"38 1\",\"pages\":\"876-878 vol.2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-04-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2004.1426310\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2004.1426310","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

摘要

研究了将微波高泛音体声波谐振器应用于液体温度传感器的可能性。剪切430mhz BAW在谐振腔结构中激发,使传感器对周围液体介质具有较高的温度灵敏度和相对较低的有害机械灵敏度。新的技术建议是通过多层布拉格四分之一波长薄膜反射器使谐振器在声学上隔离并免受环境介质的机械影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
BAW microwave temperature sensor
The paper studies the possibility of using microwave high overtone bulk acoustic wave resonators (HBAR) in temperature sensors in liquids. The shear 430 MHz BAW are excited in the resonator structure providing high temperature sensitivity and relatively low harmful mechanical sensitivity of sensor on ambient liquid media. The new technical suggestion is that the resonator is acoustically isolated and protected from the mechanical influence of ambient media by multilayer Bragg quarter-wavelength thin film reflectors.
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