用太赫兹椭圆偏振法测量复光学常数

Twenty Seventh International Conference on Infrared and Millimeter Waves Pub Date : 2002-12-16 DOI:10.1109/ICIMW.2002.1076176

T. Nagashima, M. Hangyo

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引用次数: 0

摘要

我们提出并发展了“太赫兹椭圆偏振”，其中椭圆偏振应用于太赫兹频率区域的时域光谱。本文给出了用太赫兹椭偏法得到的高掺杂半导体的复光学常数。此外，还讨论了入射角对测量精度的影响。

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Measurement of complex optical constant using terahertz ellipsometry

We have proposed and developed "terahertz ellipsometry" in which ellipsometry is applied to time-domain spectroscopy in the THz frequency region. In this paper, the complex optical constants of highly doped semiconductors obtained by terahertz ellipsometry are shown. In addition, the incident angle dependence of the measurement precision is discussed.

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Twenty Seventh International Conference on Infrared and Millimeter Waves

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