振动环境下MEMS的可靠性

2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059) Pub Date : 2000-02-03 DOI:10.1109/RELPHY.2000.843904

D. Tanner, J. Walraven, K. Helgesen, L. W. Irwin, D. Gregory, J. Stake, N. F. Smith

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引用次数: 62

摘要

微机电系统(MEMS)承受峰值加速度为120 g、频率从20到2000 Hz的振动环境。本试验选择的设备是表面微机械加工的微发动机，因为它具有许多可能易受振动影响的元件(弹簧、齿轮、摩擦表面)。在测试期间，微型发动机没有动力。在测试的22个微型发动机中，我们观察到2个与振动相关的故障和3个电气故障。令人惊讶的是，在我们的对照组中，四个微型发动机也出现了电气故障，这表明它们与振动无关。故障分析表明，电气故障是由于固定梳指与地平面短路造成的。

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MEMS reliability in a vibration environment

MicroElectroMechanical Systems (MEMS) were subjected to a vibration environment that had a peak acceleration of 120 g and spanned frequencies from 20 to 2000 Hz. The device chosen for this test was a surface-micromachined microengine because it possesses many elements (springs, gears, rubbing surfaces) that may be susceptible to vibration. The microengines were unpowered during the test. We observed 2 vibration-related failures and 3 electrical failures out of 22 microengines tested. Surprisingly, the electrical failures also arose in four microengines in our control group indicating that they were not vibration related. Failure analysis revealed that the electrical failures were due to shorting of stationary comb fingers to the ground plane.

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2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)

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