{"title":"用干涉显微镜观察电容式微机械换能器的声位移","authors":"L. Davis, D. Billson, D. Hutchins, R. A. Noble","doi":"10.1121/1.1851391","DOIUrl":null,"url":null,"abstract":"The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies.","PeriodicalId":87384,"journal":{"name":"Acoustics research letters online : ARLO","volume":"26 1","pages":"75-79"},"PeriodicalIF":0.0000,"publicationDate":"2005-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":"{\"title\":\"Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope\",\"authors\":\"L. Davis, D. Billson, D. Hutchins, R. A. Noble\",\"doi\":\"10.1121/1.1851391\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies.\",\"PeriodicalId\":87384,\"journal\":{\"name\":\"Acoustics research letters online : ARLO\",\"volume\":\"26 1\",\"pages\":\"75-79\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"18\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Acoustics research letters online : ARLO\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1121/1.1851391\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Acoustics research letters online : ARLO","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1121/1.1851391","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope
The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies.
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