单晶硅太阳能电池的织构刻蚀新工艺

K. Wijekoon, T. Weidman, S. Paak, K. Macwilliams
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引用次数: 16

摘要

我们已经非常成功地开发了一种新的,不含IPA的化学蚀刻工艺,通过使用聚合物添加剂和水性KOH来纹理化单晶硅衬底。在本文中,我们描述了在我们的基准单晶太阳能电池流中成功实现这种不含IPA的新型纹理化工艺。这些结果已经通过多次重复的长时间生产数据进行了验证。采用多个晶圆批次制造的太阳能电池的效率始终高于17.5%。发现该化学反应的表面织构能力略好于现有的KOH/IPA工艺
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Production ready noval texture etching process for fabrication of single crystalline silicon solar cells
We have very successfully developed a novel, IPA free chemical etching process for texturing single crystalline silicon substrates by employing polymer additives with aqueous KOH. In this paper we describe the successful implementation of this IPA free novel texturization process in our baseline single crystalline solar cell flow. The results have been validated with a number of repeated extended run production data. Solar cells fabricated with multiple wafer lots consistently exhibit cell efficiencies greater than 17.5%. It is found that surface texturing capability of this chemistry is slightly better than that of the established KOH/IPA process
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