使用二维尺度测量角度和直线位移

A. Korolev, A. Lukin, Y. Filatov, V. Venediktov
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引用次数: 0

摘要

最近,作者提出了一种基于二维尺度的角度测量新技术。旋转角度的测量是基于在数码相机的传感器上测量图案图像的旋转。该报告介绍了利用二维尺度测量线性位移的较早的角测量技术的推广结果。结果表明,使用物理分辨率为几微米的简单光学数字系统,可以测量误差为千分之一角秒的角度和误差为纳米几分之一的线性位移。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The use of two-dimensional scales for measuring angle and linear displacement
Recently the authors proposed a new angle measurement technology based on the use of the two-dimensional scales. The rotation angle measurement is based on measuring the rotation of the pattern image on the sensor of a digital camera. The report presents the results of generalization of the developed earlier technology of angular measurements using a two-dimensional scale to measurements of linear displacements. It is shown that using a simple optical-digital system with a physical resolution, for example, of the order of several micrometers, it is possible to measure angles with an error of one thousandth of an arc second and linear displacements with an error of a fraction of a nanometer.
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