具有生物(化学)传感应用的聚合物波导-设计和初步实验结果

IF 0.1 0 THEATER

Teatro e Storia Pub Date : 2005-12-19 DOI:10.1109/SMICND.2005.1558737

R. Rebigan, D. Esinenco, M. Kusko

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引用次数: 0

摘要

本文介绍了基于远场干涉法的硅衬底集成聚合物(生物)化学传感器的初步实验。传感器的基本结构是三明治波导聚合物结构。为了优化工艺流程，进行了几项实验研究。我们还进行了设计研究，以优化拟议的结构。

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Polymeric waveguides with bio(chemical) sensing applications-design and preliminary experimental results

In this paper we describe the preliminary experiments for a polymeric (bio)chemical sensor-integrated on silicon substrate, based on the far-field interferometric method. The basic structure of the sensor consists of a sandwich-waveguide polymeric structure. Several experimental studies have been performed in order to optimize the technological flow. We also have performed design studies in order to optimize the proposed structure.

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