{"title":"室温下纳米结构ZnO/ITO SO2探测器","authors":"U. B. Memon, A. Ibrahim, S. Duttagupta, S. Roy","doi":"10.1109/ISPTS.2015.7220080","DOIUrl":null,"url":null,"abstract":"ZnO Nanostructured thin film of thickness 200nm was deposited on quartz by spray pyrolysis technique; further interdigitated ITO electrodes were fabricated by lithography. Compositional, surface morphology and electrical characterization of ZnO nanostructure thin film was done using X-ray photo electron spectroscopy (XPS), Secondary electron microscopy (SEM), and current-voltage (I-V) measurement technique respectively. SO2 sensing was done by using a sealed container with the help of Keithley2400 SMU and MATLAB interface. It was observed that ZnO exhibited good response on exposure to SO2 gas.","PeriodicalId":6520,"journal":{"name":"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)","volume":"45 1","pages":"49-51"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nano-structured ZnO/ITO based SO2 detector in room temperature operation\",\"authors\":\"U. B. Memon, A. Ibrahim, S. Duttagupta, S. Roy\",\"doi\":\"10.1109/ISPTS.2015.7220080\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ZnO Nanostructured thin film of thickness 200nm was deposited on quartz by spray pyrolysis technique; further interdigitated ITO electrodes were fabricated by lithography. Compositional, surface morphology and electrical characterization of ZnO nanostructure thin film was done using X-ray photo electron spectroscopy (XPS), Secondary electron microscopy (SEM), and current-voltage (I-V) measurement technique respectively. SO2 sensing was done by using a sealed container with the help of Keithley2400 SMU and MATLAB interface. It was observed that ZnO exhibited good response on exposure to SO2 gas.\",\"PeriodicalId\":6520,\"journal\":{\"name\":\"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)\",\"volume\":\"45 1\",\"pages\":\"49-51\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISPTS.2015.7220080\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISPTS.2015.7220080","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nano-structured ZnO/ITO based SO2 detector in room temperature operation
ZnO Nanostructured thin film of thickness 200nm was deposited on quartz by spray pyrolysis technique; further interdigitated ITO electrodes were fabricated by lithography. Compositional, surface morphology and electrical characterization of ZnO nanostructure thin film was done using X-ray photo electron spectroscopy (XPS), Secondary electron microscopy (SEM), and current-voltage (I-V) measurement technique respectively. SO2 sensing was done by using a sealed container with the help of Keithley2400 SMU and MATLAB interface. It was observed that ZnO exhibited good response on exposure to SO2 gas.
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