MOCVD和流化床制备纳米mo /Al2O3复合材料及其微观结构

Ching-Jang Lin , Chih-Chung Yang , Wen-Cheng J. Wei
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引用次数: 17

摘要

采用金属有机化学气相沉积(MOCVD)技术在Al2O3流态化粉末床上制备纳米mo陶瓷复合材料。在此过程中,Mo物质通过Mo羰基热解沉积在Al2O3陶瓷粉末中。采用XRD/SEM/TEM技术分析了Mo2CxOy中间相的组成和结晶度,以及包覆颗粒和包覆层的微观结构。采用H2还原、无压烧结、真空热压等方法制备密度优于99% T.D.的颗粒状粉末,并对致密纳米mo复合材料的致密化、磨损和显微组织性能进行了研究。当Mo的体积分数从0 vol%增加到5 vol%时,Mo晶粒的纳米包合物抑制了氧化铝基体的晶粒生长,其平均晶粒尺寸为4.9 μm或1.2 μm。纳米mo /Al2O3的耐磨性约为纯Al2O3的2倍。通过了解Mo(CO)6的热解过程和Mo的晶粒生长动力学,可以对陶瓷复合材料中Mo晶粒的形貌和尺寸进行修饰。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Processing and microstructure of Nano-Mo/Al2O3 composites from MOCVD and fluidized bed

The process utilizing metal-organic chemical vapor deposition (MOCVD) was conducted in a fluidized Al2O3 powder bed for the preparation of nano-Mo ceramic composites. During the process, Mo species were deposited in fine Al2O3 ceramic powder using a pyrolysis of Mo carbonyl. The composition and crystallinity of the intermediate phases of Mo2CxOy, and the microstructure of the coated particles and coated layer were analyzed using XRD/SEM/TEM techniques. The granulated powder was then treated by H2 reduction, pressureless sintering or hot-pressing in a vacuum, which could achieve densities better than 99% T.D. The densification, wear, and microstructural properties of the dense nano Mo-composites were then investigated and discussed. It is seen that the nano-inclusion of Mo grains inhibited the grain growth of the alumina matrix, which had a mean grain size of either 4.9 μm or 1.2 μm, as the volume fraction of Mo increased from 0 vol% to 5 vol%. The wear resistance of the nano-Mo/Al2O3 was approximately 2 times better than that of pure Al2O3. Through an understanding of the pyrolysis of Mo(CO)6 and grain growth kinetics of Mo-species growth kinetics, the morphology and size of the Mo grains in ceramic composites can be modified.

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