VUV辐照改性聚合物薄膜传感性能的研究

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300199

E. Sarantopoulou, Z. Kollia, K. Manoli, M. Sanopoulou, D. Goustouridis, S. Chatzandroulis, I. Raptis

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引用次数: 1

摘要

提出了利用可图案化聚合物薄膜及其随后的VUV辐照处理来设计化学传感器阵列中的单个灵敏度。受辐射区域的结构变化包括聚合物链的断裂、交联和新键的形成。此外，157 nm在不同的辐照条件下，诱导了不同形状的微纳畴的表面和体积形态变化。用白光反射光谱法研究了紫外辐射对聚甲基丙烯酸甲酯(PMMA)薄膜在某些分析物中的溶胀性能的影响。PMMA薄膜的相对膨胀率明显取决于辐照条件。

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Modification of Sensing Properties of Thin Polymer Films by VUV Irradiation

The use of patternable polymeric films and their subsequent VUV irradiation treatment to engineer individual sensitivities in chemical sensor arrays is proposed. The structural changes of irradiated areas involve scission of polymeric chains, cross-linking and formation of new bonds. In addition, 157 nm induces surface and volume morphological changes in the micro/nano domain with different shapes, depending on the irradiation conditions. The effect of VUV irradiation on the swelling properties of polymethylmethacrylate (PMMA) thin films in certain analytes is studied using white light reflectance spectroscopy. The relative expansion of the PMMA film was clearly found to depend on the irradiation conditions.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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