热压氮化硅在空气中高温氧化过程中表面层形成机制的单结构和光谱研究

M.M.Abou Sekkina, M.M.A. Goda, M. Rashad, S.B. Hanna
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引用次数: 3

摘要

制备了含氧化镁添加剂的热压氮化硅试样,并在空气中高温氧化。用扫描电子显微镜检查氧化后的样品。测量了电子吸收光谱和红外吸收光谱。扫描电镜结果表明,随着晶间面积的增大,晶粒尺寸减小。随着氧化温度的升高和氧化镁含量的增加,晶界变得更加清晰。晶界的锐化是由于高温热蚀刻的影响。电子和红外吸收光谱显示,随着MgO含量和烧成温度的增加,光谱带变宽,波长向更长的方向轻微移动,并出现新的光谱带。根据现有的所有数据,这也可能与结晶度降低、晶间面积扩大以及氧化产物的形成和扩展有关。在氧化机理中,添加剂和杂质阳离子从体态氮化硅的玻璃相通过氧化膜向外扩散。驱动力是表面二氧化硅与含有大块氧化镁和杂质的相之间形成反应偶联。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Monostructural and spectral investigations of the mechanism of surface layer formation during the oxidation of hot-pressed Si3N4 in air at high temperatures

Hot-pressed silicon nitride specimens containing magnesia additives were prepared and oxidized in air at high temperatures. The oxidized specimens were examined using a scanning electron microscope. The electronic and IR absorption spectra were measured. The scanning electron microscopy results indicated a decrease in the grain size with increasing intergranular area. The grain boundaries become sharper with increasing oxidation temperature and magnesia content. The sharpness of the grain boundaries is due to high temperature thermal etching effects. Electronic and IR absorption spectra revealed band broadening, a slight shift towards longer wavelength and the appearance of new bands as a function of MgO content and firing temperature. In conformity with all the present data, this could also be correlated with the decreased degree of crystallinity, the enlargement of the intergranular areas and the formation and propagation of oxidation products. In the oxidation mechanism additive and impurity cations diffuse outwards from the glassy phase in the bulk Si3N4 through the oxide film. The driving force is the formation of a reaction couple between the surface silica and the phase containing bulk magnesia and impurities.

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