硅太阳能电池的高通量太阳电炉加工

Y. Tsuo, J. Pitts, M. Landry, C. Bingham, A. Lewandowski, T. Ciszek
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引用次数: 16

摘要

采用10kw高通量太阳电炉(HFSF)对单晶硅太阳电池的前表面n/sup +/ p结和后表面p-p/sup +/结进行了一次扩散处理。我们发现所有的hfsf处理电池都比用传统炉扩散方法制作的相同结构的对照电池有更好的转换效率。HFSF处理提供了几个可能有助于提高太阳能电池效率的优点:(1)它提供了一个冷壁过程,减少了污染;(2)温度-时间曲线可以精确控制;(3)入射太阳通量的波长、强度和空间分布可以控制和快速变化;(4)多个高温处理步骤可以同时进行;(5)量子和热效应的结合可能有利于整体电池性能。HFSF还被成功地用于硅晶片表面的织构和在玻璃上结晶a-Si:H薄膜。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High-flux solar furnace processing of silicon solar cells
We used a 10-kW high-flux solar furnace (HFSF) to diffuse the front-surface n/sup +/-p junction and the back-surface p-p/sup +/ junction of single-crystal silicon solar cells in one processing step. We found that all of the HFSF-processed cells have better conversion efficiencies than control cells of identical structures fabricated by conventional furnace diffusion methods. HFSF processing offers several advantages that may contribute to improved solar cell efficiency: (1) it provides a cold-wall process, which reduces contamination; (2) temperature versus time profiles can be precisely controlled; (3) wavelength, intensity, and spatial distribution of the incident solar flux can be controlled and changed rapidly, (4) a number of high-temperature processing steps can be performed simultaneously; and (5) combined quantum and thermal effects may benefit overall cell performance. The HFSF has also been successfully used to texture the surface of silicon wafers and to crystallize a-Si:H thin films on glass.
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