HSO铁电FDSOI NCFET的温度变化研究

R. Shaik, K. P. Pradhan
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引用次数: 5

摘要

在这项工作中,考虑到众所周知的薄膜铁电材料HSO(硅掺杂HfO2),研究了温度对MFMIS型FDSOI NCFET的影响。目前的研究是在TCAD环境中进行的,通过TCAD模拟计算HSO铁电电容器上的铁电压来获得潜在的栅极电荷,从而找到栅极堆栈中的总栅极电压。然后在改变铁电厚度$(\ mathm {T}_{F})$的情况下,对提取的值进行非滞后操作,以预测HSO铁电的最佳$\ mathm {T}_{F}$。最佳的HSO型MFMIS NCFET已经受到温度变化的影响,以预测设备在恶劣环境下的电气性能。观察到HSO型MFMIS NCFET在明显低于铁电居里温度的工作温度下,亚阈值斜率(SS)和放大因子$(\ mathm {A}_{V})$有改善,而当工作温度接近居里温度时,器件的SS和$\ mathm {A}_{V}$有轻微的恶化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of Temperature Variation on a HSO Ferroelectric FDSOI NCFET
In this work, temperature effect on MFMIS type FDSOI NCFET is investigated considering a well known thin film ferroelectric material HSO (Silicon doped HfO2). The current investigations are performed in a TCAD environment where the underlying gate charge is obtained using TCAD simulation to computing ferro voltage across the HSO ferroelectric capacitor to find the total gate voltage in the gate-stack. The extracted values are then investigated for a non-hysteric operation while varying ferroelectric thickness $(\mathrm{T}_{F})$ to predict the optimum $\mathrm{T}_{F}$ of HSO ferroelectric. The optimum HSO type MFMIS NCFET has been subjected to variation in temperature to predict the electrical performance of the device under harsh environments. It is observed that the HSO type MFMIS NCFET predicts improvement in sub-threshold slope (SS) and amplification factor $(\mathrm{A}_{V})$ at operating temperatures reduced significantly lower than the ferroelectric Curie temperature whereas the device tends to show slight deterioration in SS and $\mathrm{A}_{V}$ when the operating temperature approaches the Curie temperature.
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