非球面波前测量:Shack-Hartmann数值与实际实验

G. Artzner
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引用次数: 30

摘要

我们考虑将原始哈特曼方法应用于由沙克-哈特曼分析器产生的射线束。用准直光学的名义方法对会聚波前进行绝对的Shack-Hartmann测量,用于定位微透镜阵列上瞳孔的真实图像,当波前非球面非常强,以至于阵列的单个透镜产生的真实子图像不再同时聚焦在一个共同的平面上时,就不适用了。作为强非球面波前的例子,我们考虑在曲率中心测试大型非球面反射镜时获得的反射光束。本文将解析公式应用于几个实例,并对一个大直径强抛物面液体镜的光线跟踪程序进行了分析,结果表明,通过将位于微透镜阵列下游的交错光线的几个横截面组合起来,可以使用Shack-Hartmann方法。为了估计如何精确地从几个横截面重建亚束射线,我们进行了一个小规模的实验,以测量偏离最佳拟合球的非球面波前。微透镜阵列对每个瞳孔的2000个子区域进行采样。11个横截面,对应于尽可能多的真实和虚拟的子束射线,得到上游和下游的阵列使用中继光学放大真实图像在摄影胶片上。我们测量了57个子束,并验证了光的直线传播在底片上的精度,对应于局部45 nm波前不确定度。使用微透镜阵列上游和下游的额外横截面进行校准的不确定度值为8 nm。我们从这些数值和实际实验中得出结论,可以对Shack-Hartmann方法进行改进,以测量强非球面波前,包括从大型非球面反射镜的曲率中心测试中获得的反射波前。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Aspherical wavefront measurements: Shack-Hartmann numerical and practical experiments
We consider an application of the original Hartmann method to bundles of rays generated by a Shack-Hartmann analyser. Absolute Shack-Hartmann measurements of converging wavefronts with the nominal method of collimating optics, used to locate the real image of a pupil on a microlens array, are not applicable when the wavefront asphericity is so strong that real subimages produced by individual lenslets of the array are no longer simultaneously focused at a common plane. As examples of strongly aspherical wavefronts we consider reflected beams obtained when testing large aspherical mirrors at their centre of curvature. Analytic formulae are applied to several instances and a ray-tracing program for a large-diameter strongly paraboloidal liquid mirror suggests that the Shack-Hartmann method could, however, be used by combining several cross sections of interlaced rays located downstream from the microlens array. In order to estimate how precisely subbundles of rays may be reconstructed from several cross sections we performed a small-scale experiment to measure an aspherical wavefront departing by more than from a best-fit sphere. A microlens array samples 2000 subareas per pupil. Eleven cross sections, corresponding to as many real and virtual subbundles of rays, are obtained upstream and downstream from an array using a relay optics to give enlarged real images on photographic film. We measured 57 subbundles and verified the straight line propagation of light to within a precision on negatives corresponding to a local 45 nm wavefront uncertainty. The uncertainty value for calibration using additional cross sections upstream and downstream from the microlens array amounts to 8 nm. We conclude from these numerical and practical experiments that the Shack-Hartmann method may be modified in order to measure strongly aspherical wavefronts, including reflected wavefronts obtained from centre-of-curvature testing for large aspheric mirrors.
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