无损检测用涡流微传感器阵列的设计研究

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300197

C. Ravat, M. Woytasik, P. Joubert, Y. Le Bihan, C. Marchand, E. Dufour-Gergam, J. Moulin, E. Martincic

{"title":"无损检测用涡流微传感器阵列的设计研究","authors":"C. Ravat, M. Woytasik, P. Joubert, Y. Le Bihan, C. Marchand, E. Dufour-Gergam, J. Moulin, E. Martincic","doi":"10.1109/SENSOR.2007.4300197","DOIUrl":null,"url":null,"abstract":"In this paper, an experimental study was carried out for the design of microsensor arrays dedicated to eddy current non destructive applications. A 3-microcoil 1-D array sensor was realized thanks to microtechnology. Since each coil can be used as a transmitter or a receiver, five different transmission- reception strategies were considered for the inspection of a nickel based alloy target, featuring several calibrated surface notches. While the most basic strategy did not detect the smallest notch (0.1 x 0.1 x 0.1 mm3), the best strategy detected it with a 20 dB signal to noise ratio. The detection performances were then analyzed versus frequency and versus notch size.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"519 1","pages":"583-586"},"PeriodicalIF":0.0000,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Study for the Design of Eddy Current Microsensor Arrays for Non Destructive Testing Applications\",\"authors\":\"C. Ravat, M. Woytasik, P. Joubert, Y. Le Bihan, C. Marchand, E. Dufour-Gergam, J. Moulin, E. Martincic\",\"doi\":\"10.1109/SENSOR.2007.4300197\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, an experimental study was carried out for the design of microsensor arrays dedicated to eddy current non destructive applications. A 3-microcoil 1-D array sensor was realized thanks to microtechnology. Since each coil can be used as a transmitter or a receiver, five different transmission- reception strategies were considered for the inspection of a nickel based alloy target, featuring several calibrated surface notches. While the most basic strategy did not detect the smallest notch (0.1 x 0.1 x 0.1 mm3), the best strategy detected it with a 20 dB signal to noise ratio. The detection performances were then analyzed versus frequency and versus notch size.\",\"PeriodicalId\":23295,\"journal\":{\"name\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"519 1\",\"pages\":\"583-586\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-06-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2007.4300197\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2007.4300197","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

本文对涡流无损应用微传感器阵列的设计进行了实验研究。利用微技术实现了一种3微线圈一维阵列传感器。由于每个线圈可以用作发射器或接收器，因此考虑了五种不同的发射-接收策略来检查镍基合金目标，具有几个校准的表面缺口。虽然最基本的策略没有检测到最小的陷波(0.1 x 0.1 x 0.1 mm3)，但最佳策略以20 dB的信噪比检测到它。然后分析了检测性能随频率和陷波尺寸的变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Study for the Design of Eddy Current Microsensor Arrays for Non Destructive Testing Applications

In this paper, an experimental study was carried out for the design of microsensor arrays dedicated to eddy current non destructive applications. A 3-microcoil 1-D array sensor was realized thanks to microtechnology. Since each coil can be used as a transmitter or a receiver, five different transmission- reception strategies were considered for the inspection of a nickel based alloy target, featuring several calibrated surface notches. While the most basic strategy did not detect the smallest notch (0.1 x 0.1 x 0.1 mm3), the best strategy detected it with a 20 dB signal to noise ratio. The detection performances were then analyzed versus frequency and versus notch size.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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