热蒸发纳米结构铟硒薄膜的结构和电学性能

A. Jain, Y. Toda, D. Gujarathi
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引用次数: 2

摘要

采用热蒸发技术,在室温下将不同厚度的CuInSe纳米结构薄膜沉积在预先清洗过的非晶玻璃基板上。采用x射线衍射(XRD)、扫描电镜(SEM)和原子力显微镜(AFM)对膜的结构性能进行了表征。定量分析采用x射线能量色散分析,测定所用材料的原子百分比。用四探针电阻率法测定了沉积薄膜的电输运特性。电阻率(3.108 X 10 -5欧姆cm),活化能(0.00396 - 0.0752 eV),载流子浓度(1.30 X 10 18 /cm3),迁移率(1.53 X 10 4 cm 2 / V-s)。热电参数,如费米能量(0.025至0.461 eV),吸收系数(0.0042至0.067)已经估计。x射线衍射分析证实了薄膜本质上是多晶的,具有沿(300)面优先取向的立方结构。这种择优取向的程度随着薄膜厚度的增加而增加。计算晶格参数(a = 11.53 Å)和晶粒尺寸(D)为16.21 nm。测定了薄膜的位错密度、单位面积晶数(N)和应变(ε)。扫描电镜研究证实,纳米级颗粒几乎均匀分布在光滑的衬底上,颗粒呈颗粒状。在致密的底膜上观察到大晶粒。纳米颗粒通过相互融合形成团簇。簇的大小约为48.04 ~ 235.05 nm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Structural and Electrical properties of Thermally Evaporated Nanostructured CuInSe Thin Films
Nano structured thin films having different thickness of CuInSe were deposited by thermal evaporation techniques, onto precleaned amorphous glass substrate at room temperature. The structural properties of films were evaluated by XRD, Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The quantitative analysis was done by Energy Dispersive Analysis for x-ray to determine atomic % of the material used. The electrical transport properties of as deposited thin films have been evaluated by using four probe resistivity set up. Resistivity (3.108 X 10 -5 ohm cm), activation energy (0.00396 – 0.0752 eV), carrier concentration (1.30 X 10 18 /cm3), mobility (1.53 X 10 4 cm 2 / V-s) has been estimated. Thermo Electrical parameters such as Fermi energy (0.025 to 0.461 eV), absorption coefficient (0.0042 to 0.067) have been estimated. The x-ray diffraction analysis confirms that films are polycrystalline in nature having cubic structure with a preferential orientation along the (300) plane. The degree of such a preferred orientation was found to increase with film thickness. The lattice parameters (a = 11.53 Å) and crystallite size (D) were calculated and found to be 16.21 nm. The dislocation density, the number of crystallites per unit area (N) and the strain (ε) of the films were determined. SEM investigation confirms that nano size grains were distributed almost uniformly over smooth substrate and particles were granular in nature. Large grains on top of dense bottom films were observed. The nano grains forms cluster by fusing to each other. The size of clusters was found approximately 48.04 nm to 235.05 nm.
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