一种新的狭槽微轮廓技术

IF 0.6 4区工程技术 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Lasers in Engineering Pub Date : 2002-01-01 DOI:10.1080/08981500290022761

N. Sivakumar, K. Venkatakrishnan, B. Ngoi

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引用次数: 3

摘要

随着微加工的日益重要，为了详细地了解加工过程，表征槽面轮廓变得非常重要。本文介绍了一种将Mirau干涉法的概念应用于偏振光学，结合瞬时移相干涉法测量狭缝表面的新型光学布局。利用该装置在带槽的晶圆表面上进行了实验，并与商用表面轮廓仪的结果进行了比较，以验证该原理的适用性。本文从光斑尺寸、目标定位和测量装置的垂直分辨率等方面对所得到的结果进行了讨论，并与商用表面轮廓仪的测量结果进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A novel technique for micro profiling of slots

With the growing importance of micro machining, it has become important to characterise the profile of slot surfaces in order to understand the machining process in detail. In this paper, a novel optical layout adapting the concept of Mirau interferometry to polarization optics, in combination with instantaneous phase shifting interferometry, for measurement of slot surfaces is described. Experiments were carried out with this setup on a wafer surface with slot and the results were compared with that of a commercial surface profiler to demonstrate the applicability of the principle. The results obtained, were discussed with reference to the beam spot size, positioning of the object and the vertical resolution of the measurement setup, and compared with that of the commercial surface profiler.

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来源期刊

Lasers in Engineering 工程技术-材料科学：综合

CiteScore

1.00

自引率

20.00%

发文量

审稿时长

3.4 months

期刊介绍： Lasers in Engineering publishes original (primary) research articles, reviews, short communications and letters on all aspects relating to the application of lasers in the many different branches of engineering and related disciplines. The topics covered by Lasers in Engineering are the use of lasers: in sensors or measuring and for mapping devices; in electrocomponent fabrication; for materials processing; as integral parts of production assemblies; within the fields of biotechnology and bioengineering; in micro- and nanofabrication; as well as the materials and processing aspects of techniques such as cutting, drilling, marking, cladding, additive manufacturing (AM), alloying, welding and surface treatment and engineering. Lasers in Engineering presents a balanced account of future developments, fundamental aspects and industrial innovations driven by the deployment of lasers. Modern technology has a vitally important role to play in meeting the increasingly stringent demands made on material and production systems. Lasers in Engineering provides a readily accessible medium for the rapid reporting of new knowledge, and technological and scientific advances in these areas.