采用超细纳米加工工艺制备亚波长光栅

2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science Pub Date : 2008-05-04 DOI:10.1109/CLEO.2008.4552179

J. Nakajima, F. Koyama

{"title":"采用超细纳米加工工艺制备亚波长光栅","authors":"J. Nakajima, F. Koyama","doi":"10.1109/CLEO.2008.4552179","DOIUrl":null,"url":null,"abstract":"We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.","PeriodicalId":6382,"journal":{"name":"2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science","volume":"5 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2008-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanofabrication of sub-wavelength grating using ultra-fine nano-machining process\",\"authors\":\"J. Nakajima, F. Koyama\",\"doi\":\"10.1109/CLEO.2008.4552179\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.\",\"PeriodicalId\":6382,\"journal\":{\"name\":\"2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science\",\"volume\":\"5 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-05-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEO.2008.4552179\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEO.2008.4552179","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

提出了采用超细纳米加工工艺制备亚波长光栅的方法。我们成功地展示了用于纳米结构光子器件的20nm光栅间距的纳米加工制造，并将其用于热纳米压印模具。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Nanofabrication of sub-wavelength grating using ultra-fine nano-machining process

We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science

自引率

0.00%

发文量