金相截面和扫描电镜作为分析工具在整流器失效分析中的应用

Mikelis V. Veidis
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引用次数: 3

摘要

本文研究了用金相法评价整流器欧姆键完整性的方法。只要小心,就可以制作出好的横截面。然而,硅与金属接触键的完整性不能从二维截面可靠地估计。扫描电子显微镜被发现是不太容易受到含糊不清的试样制备的结果。扫描电镜显微照片的景深允许清晰地识别欧姆接触。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Metallographic cross sections and scanning electron microscopy as analytical tools in the failure analysis of rectifiers

The use of metallography for the assessment of the integrity of the ohmic bond of rectifiers has been investigated. With care, good cross sections can be prepared. However, the integrity of the silicon to metal contact bond cannot be reliably estimated from a two-dimensional section. Scanning electron microscopy was found to be less susceptible to ambiguities as a result of specimen preparation. The depth of field of SEM micrographs permits a clear identification of the ohmic contact.

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