光学超精密隔振平台鲁棒μ控制的实现

2009 International Conference on Environmental Science and Information Application Technology Pub Date : 2011-03-26 DOI:10.1109/ICIST.2011.5765103

Zhenyu Lu, Qi Luo

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引用次数: 0

摘要

基于结构奇异值的μ控制理论应用于主动隔振控制系统。用于解决光学超精密仪器隔振平台的不确定度问题。利用小波理论对随机振动信号进行时频域分析，从随机振动信号中提取低频信号。然后利用μ控制理论设计的μ控制器抑制系统的低频振动。实验结果表明，该方法在光学超精密仪器的隔振中具有良好的鲁棒性和控制精度。

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Realization of robust μ control for the optical ultra-precision vibration isolation platform

The μ control theory is based on the structural singular value, which is used in the control system of the active vibration isolation. It is used to solve the uncertainty of the optical ultra-precision instrument vibration isolation platform. And the wavelet theory is used to analyze the random vibration signal in the time-frequency domain and get the low frequency signal from the random vibration signal. Then the μ controller designed by the μ control theory is used to restrain the low frequency vibration. The experiment results prove that this method has shown good robustness and control precision in the vibration isolation of the optical ultra-precision instrument.

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2009 International Conference on Environmental Science and Information Application Technology

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