掺氮Si0.6Sb2Te3材料在相变存储器中的应用

Cheng Peng, P. Yang, Liangcai Wu, Zhitang Song, F. Rao, Jian'an Xu, Xilin Zhou, Min Zhu, Bo Liu, J. Chu
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引用次数: 1

摘要

氮掺杂Si0.6Sb2Te3薄膜的结晶温度(约185℃)高于Ge2Sb2Te5(约150℃),在氮掺杂Si0.6Sb2Te3材料(SST-N)晶体内未观察到分离的Si或Te相。N
本文章由计算机程序翻译,如有差异,请以英文原文为准。
N-Doped Si0.6Sb2Te3 Material for Applications of Phase-Change Memory
Nitrogen incorporated Si0.6Sb2Te3 film shows higher crystallization temperature (similar to 185 degrees C) than Ge2Sb2Te5 (similar to 150 degrees C). No separated Si or Te phase is observed within crystalline nitrogen-doped Si0.6Sb2Te3 material (SST-N). N
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来源期刊
Electrochemical and Solid State Letters
Electrochemical and Solid State Letters 工程技术-材料科学:综合
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审稿时长
1.9 months
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