N. Feil, N. Kurz, D. Urban, A. Altayara, B. Christian, A. Ding, A. Žukauskaitė, O. Ambacher
{"title":"SAW在c面(0001)和a面(11-20)AlScN薄膜中传播特性的有限元分析","authors":"N. Feil, N. Kurz, D. Urban, A. Altayara, B. Christian, A. Ding, A. Žukauskaitė, O. Ambacher","doi":"10.1109/ULTSYM.2019.8925570","DOIUrl":null,"url":null,"abstract":"Al<inf>1−x</inf>Sc<inf>x</inf>N (AlScN) is known for its large elastic and piezoelectric constants and thus is a favorable material for applications in novel radio frequency (RF) components. We investigated a-plane AlScN on r-plane Al<inf>2</inf>O<inf>3</inf> (AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102)). The surface acoustic wave (SAW) propagation properties of AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102) and AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102) were analyzed using finite element method (FEM) simulations and the results were compared. Rayleigh-type and Sezawa-type wave modes were identified and the acoustic parameters such as phase velocity, electromechanical coupling coefficient, and reflectivity were evaluated. An increased effective coupling of 5.5 % was detected for Rayleigh-type waves on AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102). The Sezawa-type modes show an even higher coupling up to 6.2 %. Furthermore, we detected increased reflectivity of AlScN(11-20) films compared to c-plane AlScN(0001). Our results reveal the potential of using a-plane AlScN for increasing the electromechanical coupling, which is needed for the upcoming piezo-acoustic filter requirements.","PeriodicalId":6759,"journal":{"name":"2019 IEEE International Ultrasonics Symposium (IUS)","volume":"55 1","pages":"2588-2591"},"PeriodicalIF":0.0000,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Finite Element Analysis of SAW Propagation Characteristics in c-plane (0001) and a-plane (11-20) AlScN Thin Films\",\"authors\":\"N. Feil, N. Kurz, D. Urban, A. Altayara, B. Christian, A. Ding, A. Žukauskaitė, O. Ambacher\",\"doi\":\"10.1109/ULTSYM.2019.8925570\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Al<inf>1−x</inf>Sc<inf>x</inf>N (AlScN) is known for its large elastic and piezoelectric constants and thus is a favorable material for applications in novel radio frequency (RF) components. We investigated a-plane AlScN on r-plane Al<inf>2</inf>O<inf>3</inf> (AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102)). The surface acoustic wave (SAW) propagation properties of AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102) and AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102) were analyzed using finite element method (FEM) simulations and the results were compared. Rayleigh-type and Sezawa-type wave modes were identified and the acoustic parameters such as phase velocity, electromechanical coupling coefficient, and reflectivity were evaluated. An increased effective coupling of 5.5 % was detected for Rayleigh-type waves on AlScN(11-20)/Al<inf>2</inf>O<inf>3</inf>(1-102). The Sezawa-type modes show an even higher coupling up to 6.2 %. Furthermore, we detected increased reflectivity of AlScN(11-20) films compared to c-plane AlScN(0001). Our results reveal the potential of using a-plane AlScN for increasing the electromechanical coupling, which is needed for the upcoming piezo-acoustic filter requirements.\",\"PeriodicalId\":6759,\"journal\":{\"name\":\"2019 IEEE International Ultrasonics Symposium (IUS)\",\"volume\":\"55 1\",\"pages\":\"2588-2591\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE International Ultrasonics Symposium (IUS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2019.8925570\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE International Ultrasonics Symposium (IUS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2019.8925570","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Finite Element Analysis of SAW Propagation Characteristics in c-plane (0001) and a-plane (11-20) AlScN Thin Films
Al1−xScxN (AlScN) is known for its large elastic and piezoelectric constants and thus is a favorable material for applications in novel radio frequency (RF) components. We investigated a-plane AlScN on r-plane Al2O3 (AlScN(11-20)/Al2O3(1-102)). The surface acoustic wave (SAW) propagation properties of AlScN(11-20)/Al2O3(1-102) and AlScN(11-20)/Al2O3(1-102) were analyzed using finite element method (FEM) simulations and the results were compared. Rayleigh-type and Sezawa-type wave modes were identified and the acoustic parameters such as phase velocity, electromechanical coupling coefficient, and reflectivity were evaluated. An increased effective coupling of 5.5 % was detected for Rayleigh-type waves on AlScN(11-20)/Al2O3(1-102). The Sezawa-type modes show an even higher coupling up to 6.2 %. Furthermore, we detected increased reflectivity of AlScN(11-20) films compared to c-plane AlScN(0001). Our results reveal the potential of using a-plane AlScN for increasing the electromechanical coupling, which is needed for the upcoming piezo-acoustic filter requirements.
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