A 128-pixel 0.56THz sensing array for real-time near-field imaging in 0.13μm SiGe BiCMOS

Real-time terahertz video cameras are regarded as key enabler systems for numerous applications. Unfortunately, their spatial resolution is fundamentally restricted by the diffraction limit. Near-field-scanning optical microscopy (NSOM) is used in the THz domain to break through this limit [1]. Recently reported THz near-field sensors based on silicon technology promise significant improvements compared to NSOM with respect to sensor sensitivity, system cost, and scanning time [2,3]. However, only single-pixel implementations have been presented with unmodulated CW sources so far, which limits the sensors dynamic range (DR) due to detector 1/f noise. This paper scales-up the research of near-field sensing into larger surfaces made of a plurality of super-resolution pixels with video-rate imaging capabilities. The 128-pixel 0.56THz imaging array includes all functions such as illumination, sensing, detection, and digital readout on a single silicon chip.